Fabrication of opto-electronic devices based on 2D materials using class 100 and 1000 cleanrooms.
Tools & techniques: e-beam lithography (NanoBeam NB4, Raith Voyager), optical lithography (Durham MicroWriter, mask aligners), thermal evaporators (HHV Auto 306, Edwards E306A), RIE (JLS Designs RIE 80, Polaron PT7150), wire bonders (K&S 4123, 4524), Plasma-Therm 790 PECVD, Mattson RTA, mechanical exfoliation fo 2D materials, assembly of van der Waals heterostructures using deterministic dry mechanical transfer.