Fabrication of novel devices using a variety of nanopatterning techniques, including Electron Beam Lithography, Optical Lithography, Nanoimprint Lithography. Extensive experience with of thin film deposition techniques (Magnetron Sputtering, Thermal Evaporation, Ion Beam Sputtering) and etching processing (RIE, ICP, IBE, FIB). In depth knowledge of metrology techniques – AFM, SEM, EDX, XRD, Ellipsometry, FTIR. Examples of fabricated devices can be found in the following articles: